Metal-Semiconductor Interfaces

This volume presents a collection of papers written by authors who were members of a project on Metal-Semiconductor Interfaces , sponsored by the Ministry of Education, Science and Culture of Japan (MON-BUSHO). Almost one billion metal-semiconductor interfaces or contacts may be found in a silicon chip whose size is less than one square centimetre. Consequently, there has been a great deal of research into metal-semiconductor interfaces, especially since the 1980s. The Metal-Semiconductor Interfaces project was composed of 4 research branches to tackle the following subjects that are covered in this book: theoretical approaches; initial stage of metal-semiconductor interface formation; interface structure of metal-semiconductor systems; realization and control of contact characterization; and novel characterization techniques of buried interfaces.