A Guide to Hands-on MEMS Design and Prototyping

Sold by Ingram

This product may not be approved for your region.
Spring sale 20% off Books
$155.00 You save $23.25
Hardback
  • Free Shipping

    On orders of AED 100 or more. Standard delivery within 5-15 days.
  • Free Reserve & Collect

    Reserve & Collect from Magrudy's or partner stores accross the UAE.
  • Cash On Delivery

    Pay when your order arrives.
  • Free returns

    See more about our return policy.
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.